China's largest semiconductor foundry, Semiconductor
Manufacturing International Corporation (SMIC), has recently announced a
major breakthrough - mass producing 7nm chips without using the
advanced extreme ultraviolet (EUV) lithography machines.
SMIC's
new 7nm Kirin 9000 mobile processor is designed by Huawei's chip company
HiSilicon. It is comparable in performance to Qualcomm's Snapdragon 888
processor built on superior 4nm technology, despite the large process
gap.
The Kirin 9000 is used in Huawei's high-end smartphones as
an alternative to Qualcomm's market-leading chips. This demonstrates
impressive engineering and execution by SMIC to be able to produce
advanced 7nm chips using older deep ultraviolet (DUV) lithography tools
instead of the latest EUV systems.
In reality, the numbers like
7nm, 5nm or 3nm that are used to name process nodes no longer actually
refer to any physical transistor dimension on the chips. Below 16nm,
these names are more of a marketing number to benchmark the performance
and density against what planar transistors would have achieved if they
could be hypothetically shrunk down to those dimensions.
Different
semiconductor fabs can produce transistors with varying performance and
density while still calling them by the same process node name like
7nm. However, from various technical analyses, SMIC's N+2 process does
seem to be comparable in density and transistor performance to the 7nm
nodes from TSMC and Samsung Foundry.
The Taiwan based TSMC began
mass production of 7nm chips using EUV lithography tools back in 2017.
EUV uses light at 13.5nm wavelength compared to 193nm for conventional
DUV systems, allowing much higher resolution patterning.
Without
access to these advanced EUV scanners, achieving good yields and
economics at the 7nm node and beyond is extremely challenging using the
older DUV tools. To enable 7nm patterning, SMIC is using multiple
patterning techniques, exposing each wafer 5-6 times with multiple masks
just to pattern a single transistor feature. While this can work, the
complexity likely makes their 7nm process node far less economically
efficient compared to the same node from TSMC or Intel which leverages
EUV lithography.
In theory, with enough multi-patterning, SMIC
could push their DUV tools even further to try and produce 5nm or even
3nm node chips. However, the mask counts, costs and defect rates will
keep rising exponentially, leading to extremely low yielding and
prohibitively expensive chips.
Even TSMC's own 3nm node makes
use of DUV lithography and multi-patterning as an interim solution until
the next generation of High-NA (numerical aperture) EUV tools become
available. Therefore, it is highly unlikely that SMIC would be able to
progress much further beyond 7nm with just DUV multi-patterning.
China's
broader goal is to build self-sufficiency in advanced semiconductor
technology rather than rely on foreign sources. Although extremely
challenging, SMIC's current achievements at 7nm FinFET will stimulate
further lithography innovations within the Chinese semiconductor
industry.
With continued creative engineering efforts and
strategic capital investment, China could gradually gain competitiveness
in semiconductor manufacturing versus established giants like TSMC,
Samsung and Intel. Having advanced domestic chip production capabilities
will be a huge plus for China in the long run across many strategic
technology sectors.
The geopolitical tensions and trade war with
the US has made semiconductor technology self-reliance an urgent
priority for China. However, the US has imposed escalating export
controls to restrict China's access to semiconductor manufacturing
equipment and software tools, especially advanced EUV lithography
systems from ASML. Therefore, indigenous technology development is
crucial for China's semiconductor ambitions. The innovative
multi-patterning techniques devised by SMIC engineers to work around the
lack of EUV is a great example of maximizing capabilities under
challenging constraints.
The recent US CHIPS act provides over
$50 billion subsidies to boost semiconductor manufacturing and R&D
in the US. This technology competition with China will stimulate further
innovations in lithography. For example, China is accelerating research
into novel patterning solutions like directed self-assembly (DSA) which
arranges block copolymers into organized semiconductor patterns.
Advancements in maskless lithography like massively parallel electron
beam direct write is another approach to reduce multi-patterning costs.
Such emerging techniques could help China overcome the constraints of
multi-patterning with DUV.
China also cannot rely exclusively on
domestic talent and has to tap global expertise just like Silicon Valley
does. Chinese firms are actively recruiting semiconductor engineers and
experts across the world. In 2020, SMIC managed to hire top lithography
engineers from TSMC and other Taiwanese firms to aid its advanced nodes
development. Leveraging such rare expertise while also training its own
chip engineers will boost China's human capital foundation in
semiconductors.
With each new generation, semiconductor
technology tends to require greater capital investments measured in
billions of dollars. SMIC already has raised over $8 billion just last
year. China's national IC fund has put in $29 billion and local
governments have poured in billions more. Such massive investments will
continue expanding China's semiconductor production capacity. In
addition to national level funding, local startups like Huawei's
HiSilicon are designing advanced chips helping raise China's ambitions.
Now
that SMIC has achieved 7nm FinFET production, it is on track to
generate revenue of around $5 billion this year. In comparison, global
leader TSMC registered revenue of $56 billion in 2021. With increasing
domestic demand from Chinese technology firms, SMIC's capacities will
keep growing. In the first half of 2022, it announced capacity expansion
plans for $8.87 billion. SMIC is also expanding into 300mm wafer
fabrication which offers better economies of scale. Such relentless
expansion will progressively enhance China's position in the
semiconductor value chain.
Of course, in the near term SMIC and
other Chinese firms still face considerable challenges to achieve parity
with semiconductor giants like TSMC and Samsung which are investing
even more aggressively. TSMC plans to allocate $40–44 billion in capex
this year, aiming to increase capacity for advanced nodes. It is already
gearing up for commercial 2nm node production. Samsung is ambitiously
targeting 1.4 nm by 2027 with total planned investment of $150 billion
in a decade. Nevertheless, China is playing the long game with its
semiconductor initiatives.
Samsung and TSMC pioneered early EUV
development by partnering with ASML years ahead of the rest. This lead
time advantage gave them a multi-year technology edge. Similarly, today
TSMC and Samsung are already focused on developing next generation
lithography technologies like High-NA EUV, multi-beam e-beam mask
writers and even looking beyond EUV. China is still playing catch up to
EUV, but future lithography breakthroughs could progressively reduce
this gap.
For example, SMIC has rapidly built up annual DUV
lithography capacity to 600,000 wafers per month across two advanced
300mm fabs. This volume is necessary to economically sustain
multilpe-patterning FinFET production. ASML is China's largest supplier
with over 50 DUV immersion scanner installations at SMIC. This year,
SMIC has ordered another 50 ASML DUV tools, keeping procurement pace
with the industry leaders. Such investments ensure the manufacturing
capacities are ready, even as the technical challenges are resolved
incrementally.
Realistically, while matching the manufacturing
scale of TSMC and Samsung will take time, even reaching 50-70% of their
capacity will be sufficient to satisfy China's domestic needs in 5G,
HPC, AI, automotive and other strategic sectors. SMIC is aligning well
with national policies like the "Made in China 2025" plan which sets 70%
self-sufficiency target in high-end semiconductors. Furthermore,
another Chinese firm HSMC which focuses on below 28nm nodes joined SMIC
in FinFET production this year. Having complementary players will add
capacities to aid China's progress.
With significant foundry
capacity online, the supply ecosystem also needs to develop. Chief among
these are domestic designers of advanced semiconductor chips like
Huawei's HiSilicon. Recent efforts like the Open Source CHIPS Alliance
aims to reduce the barriers for designing chips in open ecosystems. As
more sophisticated semiconductor IP for AI, networking and high
performance computing are developed in China, domestic demand for
leading edge manufacturing will organically rise. This will provide
increasing incentives for progress in lithography and semiconductor
competencies in China.
The key challenge for China is integrating
all the pieces of the semiconductor value chain - EDA tools, IP,
packaging, advanced materials along with lithography and manufacturing.
Taiwan's TSMC has already architected a comprehensive ecosystem making
it hard to displace. However, China aims to build sufficient
self-reliance in each vertical rather than outright beat TSMC. The goal
is strategic independence across the supply chain.
In that
regard, indigenous Chinese EDA companies like Empyrean, Lucata and
Loongson are emerging to develop affordable custom chip design software.
Packaging giants like ASE are setting up advanced facilities in China.
Beijing is focused on nurturing domestic IP ecosystem for standard chips
needed in broad applications like IoT. SMIC itself is co-developing
unique IPs like cryptographic security chips to meet local needs. Such
expanding know-how across the horizontal value chain will cement China's
progress.
The new 7nm FinFET chip from SMIC demonstrates
noteworthy engineering by a Chinese semiconductor company, achieved
under challenging business conditions due to geopolitics. However, it is
also a validation of the cumulative investments China has made over
decades to build up competitive advanced semiconductor manufacturing
starting from basic silicon wafers and materials.
SMIC's systemic thinking to develop unique solutions like tailored lithography processes without EUV represents the country's strategy of semiconductor self-reliance. While closing the gap with Samsung and TSMC remains an uphill task, China is accelerating long-term national competencies in lithography, equipment, materials, IP and design to aid the ascent of its semiconductor industry.